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  半導體III-V 族 - ClassOne - 批次型化學蝕刻/清洗機 Trident™ SST Spray Solvent Tools



批次型化學蝕刻/清洗機
Trident™ SST Spray Solvent Tools
Spray Solvent Tools for 75-200mm Substrates
Trident Spray Solvent Tool (SST)是新一世代Batch式的Solven機台,針對Metal Lift-Off、光阻去除及其它需要用到Solven製程所設計。Trident Spray Solvent Tool機台可供3到8吋產品使用 - 可以訂制一或二個製程chambers ; 2/4/6或8個可加溫化學槽。此機台包含Windows® 7-based Solaris™ 控制器及可遠端登錄的能力,SECE/GEM通訊模組也可供客戶做選擇。
Trident™ SST具有比競對手更好的生產力及機台妥善率,系統定價也明顯低於競爭對手的檟格,有相當顯著的低資本支出。
特點:
icon 1. One or two process chambers
2. Available for 75-200mm substrates
3. 2-, 4-, or 6- tank models
4. Wide range of rotors
5. Windows®7-based Solaris controller
6. Remote login
7. Data logging
8. GEM/SECSII communications
標準規範:
icon Solstice Plating System
Best of West Winner
Semicon West 2015
應用:
Major Benefits
■ Significantly lower operating expense
■ Reduced chemical consumption
■ Shorter process time
■ Fewer defects
■ Easier control and operation
Processes for Spray Solvent Tools
■ Metal Lift-Off
■ Resist Strip
■ Polymer Removal
■ Substrate Cleaning
■ Resist Developing
規格:
icon
 
 
 
 
 
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