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  半導體III-V 族 - Semitool - Spray Solvent Tool



Spray Solvent Tool (SST -batch type ) 批式旋轉噴洗式有機溶劑處理槽
Spray Solvent Tool (SST -batch type ): l It is designed for a broad range of applications which solvent or solvent based chemictries for process . Application : Photo-resist strip, Photo-resist developing, polymer removal, metal lift-off and substrate cleaning.
 
 
 
 
 
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