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  半導體III-V 族 - NGR - NGR 3510



NGR 3510

Unique technologies improve wafer performance
特點:
icon 1. Wide FOC Image acquisition
2. High sensitivity
3. Die to Database algorithm
標準規範:
icon
應用:
icon
規格:
icon Max: 70um x 70um
Enough sensitivity for defect inspection beyond 1xnm process
Comparison between design data and SEM image with high speed and high accuracy
 
 
 
 
 
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