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  半導體III-V 族 - KLA-Tencor 美商科磊 - MicroXam-100 / MicroXam-800 光學式表面/膜厚量測儀



MicroXam-100 / MicroXam-800 光學式表面/膜厚量測儀
量測表面的形狀,可顯示高度、深度及寬度。
特點:
icon 此儀器是利用白光干涉的光學原理來掃描物體的表面,以得到表面輪廓的資訊。
標準規範:
icon SEMI S2, S8, and S14
European CE
WEEE and RoHS – 2002/95/EC
應用:
icon 表面輪廓 蝕刻深度 膜厚量測儀
Semiconductor, LED, LCD, Photovoltaic, Material, LCD, Thin Film
規格:
icon MicroXam-800
1. 250 µm closed loop Z-range piezo
2. 1.4 megapixel camera, 1360 x 1040
3. SMART mode, ZSI, PSI (phase mode), and VSI (vertical scan mode)
4. 152 x 152 mm motorized XY-sample positioning stage
5. 125 mm motorized Z-stage with an optional 76 mm offset block
6. (optional) 360° theta stage
7. Green and white solid state light sources
8. 1.4 megapixel camera
9. Powered by new software platform – simple, yet powerful software
10. Windows 7, 64-bit with MS Office

 
 
 
 
 
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